ECE FACULTY

Reza Ghodssi

Title: Herbert Rabin Distinguished Associate Professor
Areas/Affiliations: ECE, ISR, NanoCenter, BioE, UMERC, MSE
E-mail: ghodssi@umd.edu
Phone: (301) 405-8158
Office: 2236 Jeong H. Kim Engineering Building

Website: http://www.enee.umd.edu/~ghodssi/

Biography:

Reza Ghodssi is the Herbert Rabin Distinguished Associate Professor and Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) and the Institute for Systems Research (ISR) at the University of Maryland (UMD). He is also affiliated with the Fischell Department of Bioengineering (BIOE), the Maryland NanoCenter, the University of Maryland Energy Research Center (UMERC), and the Materials Science and Engineering Department (MSE) at UMD.

Dr. Ghodssi's research interests are in the design and development of microfabrication technologies and their applications to micro/nano devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting. At Wisconsin, his Ph.D. thesis was focused on development of a high aspect ratio microfabrication process for an electrostatic driven MEMS device using x-ray lithography and LIGA technology. At MIT, he developed the building block MEMS fabrication technologies for a microturbine generator device, and also served as an Assistant Director on that project. At Maryland, his research group has pioneered the development of next generation PowerMEMS devices supported on micro-ball bearing, MEMS-based gray-scale technologies and the use of novel III-V optical MEMS devices and systems for chemical and biological detection.

Dr. Ghodssi's research has been funded by Army Research Lab (ARL), National Science Foundation (NSF), Laboratory for Physical Sciences (LPS), NASA Goddard Space Flight Center (GSFC), National Institute of Standards and Technology (NIST) and R.W. Deutsch Foundation. He has served as a program co-chairman for the 2001 International Semiconductor Device Research Symposium (ISDRS) and as a chairman of the "MEMS and NEMS Technical Group" at the American Vacuum Society (AVS) from 2002 to 2004.

Dr. Ghodssi has over 60 scholarly publications, is the co-editor of the "Handbook of MEMS Materials and Processes" to be published in 2009, and is an associate editor for the Journal of Micorelectromechanical Systems (JMEMS) and the Journal of Biomedical Microdevices (BMMD). Dr. Ghodssi has received the 2001 UMD George Corcoran Award, the 2002 National Science Foundation CAREER Award, and the 2003 UMD Outstanding Systems Engineering Faculty Award. He was among 100 of the nation's outstanding engineers invited to attend the National Academy of Engineering (NAE) U.S. Frontiers of Engineering Symposium in 2007. Dr. Ghodssi is the co-founder of MEMS Alliance in the greater Washington area and a member of the IEEE, AVS, MRS, ASEE and AAAS societies.


Research Interests:

Design and development of microfabrication technologies and their applications to micro/nano devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting.


Also see:
MEMS Sensors & Actuators Lab (MSAL)


Spotlight on Research:
Nano-Sensor System Using Chitosan for the Detection of Dangerous Substances

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