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INSPIRE Project Description: Summer 2004

Process Development and Optimization for Fabrication of Low Cost Visible Blind Ultra Violet Photodetectors on Glass and Polyimide
Prof. I. Takeuchi,(UMCP) and
Dr. R. D. Vispute, (Blue Wave Semiconductors)

Blue Wave Semiconductors, Inc. is interested in developing low cost innovative visible blind UV photodetectors based on metal-oxide system, a commercialization project funded through Small Business Innovation Research (SBIR) program by National Science Foundation. Activities to be carried out in this project are investigation of thin films of oxides having band gaps varying from 3.3 eV to 7.9 eV, creation of new, wider, and tunable band gap materials through alloying and then implement for fabrication of UV detectors on low cost substrates such as glass, polyimide, and silicon for commercialization of cost effective products. Students will participate in:

  1. optimization of thin film deposition processes, metallization schemes, and device (UV detector photodiodes for specific wavelengths desired from 170-360nm) fabrication methodologies
  2. establishing the manufacturing process for the production of reproducible UV detectors through high quality thin film layers and metallization (wet lithography).

  3. current-voltage (I-V) characterization of devices with and without UV radiation. Investigate and compare dark current and photoresponsivity as a function of film orientation, microstructure, and defects.
  4. product testing, performance and failure analysis through commercial partners and collaborators.
  5. process development and methodology for the fabrication and commercialization of large area focal plane array of UV detectors, and
  6. developing tools for manufacturing/scale-up process in the company.